MegPie® - Single Wafer Megasonic Cleaner from ProSys Inc. скачать в хорошем качестве

MegPie® - Single Wafer Megasonic Cleaner from ProSys Inc.

The MegPie® megasonic transducer by ProSys Inc. is for non-contact cleaning or sonochemical processing a single rotating substrate. It applies a radially uniform dose of acoustic energy to improve process results with low operating costs. Operating conditions are continuously measured to ensure consistent outcomes. RADIALLY UNIFORM FIELD APPLIES EVEN DOSAGE PRE ≥ 98% for particles down to 19 nm Every portion of the wafer For every wafer processed SINGLE CRYSTAL SAPPHIRE RESONATOR Chemistry flexibility Zero particles added No surface pitting Stainless steel for solvent applications LOW OPERATING COSTS MTBF ≥ 209,000 hours No PM, no consumables Less than 1 lpm process fluid for 300mm wafer IMPULSE MONITORS OPERATION Sonic dosage Reflected power Temperature Electrical parameters