Simulation and fabrication of MOSFET on Silvaco TCAD, Drain Voltage, Drain current waveform скачать в хорошем качестве

Simulation and fabrication of MOSFET on Silvaco TCAD, Drain Voltage, Drain current waveform

@ScienceWala6378 source code: go athena --------------- MESH define ---------------- line x loc=0.00 spac=0.10 line x loc=0.2 spac=0.006 line x loc=0.4 spac=0.006 line x loc=0.5 spac=0.10 line y loc=0.00 spac=0.002 line y loc=0.2 spac=0.005 line y loc=0.5 spac=0.005 line y loc=0.8 spac=0.15 --------------- SUBSTRATE Mesh Initialize ---------------- init silicon c.boron=1.0e15 orientation=100 two.d Field Oxide Growth diffus time=250 temp=1250 dryo2 etch oxide all Gate Oxide Growth diffus time=50 temp=1000 dryo2 --------------- POLY GATE --------------- deposit polysilicon thick=0.2 divisions=10 etch polysilicon left p1.x=0.35 Thin Oxide for Implant diffus time=10 temp=1000 dryo2 --------------- SOURCE/DRAIN IMPLANT --------------- implant arsenic dose=5.0e14 energy=50 tilt=0 rotation=0 crystal etch oxide left p1.x=0.2 etch oxide above p1.y=0.005 --------------- METAL --------------- deposit aluminum thick=0.05 divisions=10 etch aluminum right p1.x=0.1 Mirror Structure struct mirror right --------------- ELECTRODES --------------- electrode name=Gate x=0.50 electrode name=Source x=0.10 electrode name=Drain x=0.90 struct outfile=mosfet.str tonyplot mosfet.str go atlas mesh infile=mosfet.str Contacts contact name=gate n.poly Fixed Interface Charge interface qf=3e10 Models models cvt srh print numcarr=2 Numerical Method method newton itlimit=25 trap maxtrap=4 autonr Initialize solve init Gate Bias Points solve vgate=1 outf=solve_tmp1 solve vgate=2 outf=solve_tmp2 solve vgate=5 outf=solve_tmp3 --------------- ID-VDS for VGS=1V -------------- load infile=solve_tmp1 log outf=mos1.log solve name=drain vdrain=0 vfinal=3.3 vstep=0.3 --------------- ID-VDS for VGS=2V --------------- load infile=solve_tmp2 log outf=mos2.log solve name=drain vdrain=0 vfinal=3.3 vstep=0.3 --------------- ID-VDS for VGS=5V --------------- load infile=solve_tmp3 log outf=mos3.log solve name=drain vdrain=0 vfinal=3.3 vstep=0.3 Plot All tonyplot -overlay mos1.log mos2.log mos3.log quit