Prof. David Graves - Low Temperature Plasma with Applications from Nanofabrication to Biomedicine скачать в хорошем качестве

Prof. David Graves - Low Temperature Plasma with Applications from Nanofabrication to Biomedicine

Prof. David Graves, Princeton University - USA Non-equilibrium plasma (NEP), also known as low temperature plasma (LTP), can be thought of as a unique form of matter with distinct properties. These plasmas are weakly to partially ionized, with electrons generally much hotter than ions or neutrals. There is an enormous range of important applications of NEP and I will discuss several of these applications. The first application focuses on low pressure plasma used for thin film etching and deposition in the nanofabrication of devices in the semiconductor industry and in the nascent field of quantum information science. Second, I address the use of atmospheric pressure NEP as applied to plasma biomedicine. Finally, I present recent results related to atmospheric pressure air plasma used for various global sustainability challenges.