TEM sample creation using a ThermoFisher G4 Plasma FIB (PFIB) скачать в хорошем качестве

TEM sample creation using a ThermoFisher G4 Plasma FIB (PFIB)

This is a recording of the FIB preparation of a silicon based sample for TEM imaging. The work was done at the Michigan Center for Materials Characterization (MC2) by Dr. Allen Hunter. The instrument used for the procedure is a ThermoFisher G4 PFIB UXe plasma fib. Major sections of the video: 0:00 Introduction 0:43 Alignment of Easylift needle 8:10 Preparing Mo grid 14:50 Locate sample ROI 18:30 Deposit SEM Pt protective capping layers 24:30 Deposit FIB Pt protective layer (~12 minutes are cut from video) 34:30 Regular Cross section cuts 43:00 Cleaning Cross section cuts 53:00 Undercut for liftout 57:22 Cleanup step 58:56 Liftout procedure and attach to Mo grid 1:08:28 Deposit additional welds to secure sample to grid 1:13:25 First thinning cuts at 30 kV 1:18:55 Second thinning cuts at 30 kV 1:24:56 5 kV thinning 1:32:50 2 kV thinning 1:45:30 Finished sample and system venting