Limiting Current-Type MEMS Oxygen Gas Sensor Integrated with Micro-Hotplate скачать в хорошем качестве

Limiting Current-Type MEMS Oxygen Gas Sensor Integrated with Micro-Hotplate

Sponsored by IEEE Sensors Council (https://ieee-sensors.org/) Title: Limiting Current-Type MEMS Oxygen Gas Sensor Integrated with Micro-Hotplate Author: Shunsuke Akasaka{2}, Isaku Kanno{1} Affiliation: {1}Kobe University, Japan; {2}Rohm Co. Ltd, Japan Abstract: In this study, we developed a limiting current-type MEMS oxygen sensor with low power consumption. The MEMS oxygen gas sensor comprised a thin-film YSZ oxygen gas-sensing layer integrated on a micro-hotplate. The sensor volume was about one hundred times smaller than that of the conventional bulk YSZ oxygen gas sensors. The YSZ layer was prepared on a porous Pt layer in which oxygen gas was diffused through the spiral Ta2O5 underlayer. The YSZ oxygen-sensing layer was heated by the micro-hotplate on the diaphragm structure. Because of the extremely low heat capacitance of the oxygen sensor and heater elements, the power consumption for sensing oxygen gas concentration was drastically decreased to 80 mW, approximately 1/30 of that of conventional bulk YSZ oxygen gas sensors. We successfully observed the proportional increase of the limiting current with increasing oxygen concentration with the sensitivity of 0.6 A/%, which is high enough to monitor atmospheric oxygen concentrations. IEEE Sensors Conferences (https://ieee-sensors.org/conferences/) IEEE Sensors Journal (https://ieee-sensors.org/sensors-jour...) IEEE Sensors Letters (https://ieee-sensors.org/sensors-lett...) IEEE Internet of Things Journal (https://ieee-iotj.org/)