Radius of Curvature Metrology with high precision using Fizeau Interferometers скачать в хорошем качестве

Radius of Curvature Metrology with high precision using Fizeau Interferometers

Reviews methods of measurement of radius of curvature of optical components and their associated error sources. Including insights in Abbe Error. Primary focus is on highest-precision results, using phase-shifting interferometers like the Zygo Verifire, a Fizeau laser interferometer. Discusses the uncertainty of the various measurement methods and demonstrates radius measurements using an interferometric radius slide with a video walkthrough. The results of a comparison between three high-precision interferometer workstations are presented, showing the ability to measure radius to less than 10 parts per million with the proper technique.