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This video tutorial (as always, filmed raw, unedited, unfiltered, uncensored, and uncut) covers STEM-EDS (otherwise known as XEDS or EDX) mapping using our Cs probe-corrected Themis Z S/TEM equipped with a SuperX EDS system. Using a III-V semiconductor photonic device structure as a test sample, I cover STEM-EDS mapping at the atomic scale (~140 pm resolution) using "nanoprobe" STEM mode (which is what the system is well-known for performing), but also show how the system can be used effectively for STEM-EDS mapping deep into the nanoscale (~1 nm resolution) using the lesser known (and often underutilized) "microprobe" STEM mode. The differences between aligning the system in nanoprobe STEM mode versus microprobe STEM mode are also discussed as well as when you would want to use one STEM mode versus the other for STEM-EDS mapping. SPOILER: if you don't need to perform atomic-scale EDS mapping, you are probably fine simply using microprobe STEM mode for STEM-EDS mapping (even for very fine nanoscale features). Thanks for watching! Please like, subscribe, and share and let me know if you have any questions or comments. Video topic requests are always welcome and appreciated; I enjoy making these videos and wish I could make them more frequently, but the demands of my job make it tough to do so; I’m in charge of 3 S/TEMs, 2 dual beam FIB/SEM systems, and 1 SEM and this keeps me very busy! Connect with me on LinkedIn: / nicholas-rudawski-30414528 E-mail me directly: ngr@ufl.edu