RIANA Webinar: Exploring plasma and its use in nanofabrication: Etching скачать в хорошем качестве

RIANA Webinar: Exploring plasma and its use in nanofabrication: Etching

This talk introduces participants to the fascinating world of plasma and its role in nanofabrication. It explains what plasma is, how it is generated, and why it is considered the "fourth state of matter." Main components of plasma processing equipment, offering insights into how each element contributes to controlled material modification at the nanoscale are given. A key focus is on plasma etching techniques, including physical, chemical, and reactive ion etching. To bridge theory with practice, real-world applications and examples that demonstrate how plasma etching enables the creation of advanced devices and structures in microelectronics, photonics, and nanotechnology are presented.