Advancing Plasma Power Delivery скачать в хорошем качестве

Advancing Plasma Power Delivery

In Episode 6 of The Advancing Energy Podcast, brought to you by Advanced Energy, Juergen Braun, Advanced Energy’s Senior Vice President, Plasma Power, and Dhaval Dhayatkar, Advanced Energy’s Vice President, Critical Sensing and Control, discuss Advanced Energy’s innovations in plasma power for the semiconductor industry. As the semiconductor industry speeds toward a new inflection, the eVerest® RF generator fills the need for transformational plasma control. Its configurable multi-level pulsing enables instantaneous or user-defined transition timing. Additionally, high-speed, high-accuracy model-based frequency tuning with wide frequency sweep range provides greater process stability and control. In addition, the NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated analysis for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest generator, NavX completes AE’s latest RF delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries. To learn more about Advanced Energy’s solutions for the semiconductor industry, visit: www.advancedenergy.com/en-us/applications/semiconductor/.