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Silicon Valley Group Coater

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. HMDS is only available at track 2. The uniformity of spun photoresists are typically +/- 100 Å. For more information: https://snf.stanford.edu/ http://nanolabs.stanford.edu/