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SEMI S2 with High Tech Design Safety CEO, Steve Barcik Amstel - http://hightechdesignsafety.com/ This is our continuing video training series on SEMI S2, the safety guideline for semiconductor manufacturing equipment. Hi this is Steve Barcik Amstel with High Tech Design Safety. This is the next video in our ongoing SEMI S2 Training Series. SEMI S2 is a guideline that provides details for the design, implementation, documentation of semiconductor manufacturing equipment and ancillary equipment to those processes. We are continuing right now with Section 8 about the report and report contents. Throughout the video, we will go through section by section with this. Please look at the previous videos if you have not. There is some great in depth information that will help you with your process and what there is to do next. This part of Section 8 talks about documentation provided to the evaluators. The documents that you are going to need to provide are the manuals…the installation manual, the operations manual and the maintenance manual. If you lack those at this time, there is broiler plate available to prepare your manuals and have them work for you. If you need any additional information on creating your manuals there are other standards within the SEMI guidelines that can help you put that information together and complete it in such a way that it meets the other standards. Additionally requirements include the intended use, which will be included in the manual. Other requirements include the serial number, the model number, and we need to put down the location and then the time and date of the evaluation and the time and date of the report. Further information that is required for the evaluation would be detailed data and parts lists and conformity lists for your safety interlock systems…any of that safety related equipment. We will need all of that data. So for safety related equipment, also include fire detection and suppression equipment, gas detection equipment…suppression for your gas will be your exhaust and exhausted enclosures, we will get into that later. For each of those devices, you need full characterization and suitability for use data. This suitability for use data will be included in your bill of materials (BOMs), which will include all critical components… so any safety related components. It will also include any electrical components operating above 240-volt amps. Anything operating at line voltage of course and then anything operating at fairly high power at 240 va or more will included in that. We have a template that you can use to collect that data and put it in. And as you collect the data we will want to go ahead and collect the UL, TUV or whatever listing body has listed or recognized that component as suitable for use. Additional reports that we will help you create or that you may already have or we will create wholly for you will include an ergonomics assessment, a fire risk assessment, and then that safety functional assessment that we talked about earlier. Additionally you will need a risk analysis of your equipment, its operation, installation, and maintenance as well. Further documentation required for the evaluation will include industrial hygiene evaluation of the equipment. That includes all of the chemicals, their types, their toxicity, their occupational exposure limits, and more data even. If you do have chemicals and they are toxic or flammable, you will need an industrial hygiene report and testing, which indicates the ability to contain and control those chemicals to prevent release, exposure, and fire or explosion. We here at High Tech Design Safety are able to do this testing for you as well either as a preliminary or as a final for the development of your SEMI S2 evaluation. Additional we will need environmental information, meaning release rates, exhaust rates, containment process, so if you have a spill…how is it contained? And then details of all the drains and everything else for the environmental sections of SEMI S2. This combined totals all the documentation required for the SEMI S2 report. Now I know that for some of you a lot of these items will not be required and… I didn’t cover some of the other items like is there any radiation? Are there any lasers? Are there any material handling equipment or other things like that? We will need that documentation and I will cover those requirements in future videos of this training. We appreciate your time. Please like and subscribe below and make comments or contact us directly if you have questions about the process and how to get this done. We would really like to help you with your SEMI S2 requirements and your equipment design review requirements. • SEMI S2 Section 8 Evaluation Process P2